来源：NTU

The Dual Degree Programme for Master of Science in Micro Electro Mechanical Systems (MEMS) Engineering offered by NTU and ESIEE seeks to provide global enterprises and research institutes with world class technologists in the field of MEMS Engineering, by tapping on both European and Asian professional experiences. This Programme will provide outstanding and complementary expertise and facilities of both institutions in the field of MEMS Engineering, with contributions also from two academic junior partners in Europe and Asia as well.

Micro Electro Mechanical Systems (MEMS) are integrated devices or systems combining electrical, mechanical, biological, optical and chemical components. They are fabricated using wafer fabrication techniques and range in size from micrometers to millimeters. They are able to sense, control, and actuate on a micro-scale, and function individually or in arrays to generate effects on a macro scale. Examples of such systems are micro optical switches, micromotors, inkjet print head, micro drug delivery systems, biochips, and chemical sensors. as the numerous regional academic and industrial networks of both institutions.

Upon satisfactory completion of the prescribed Programme, the student will be awarded the following 2 master degrees :
- Master of Science in Micro Electro Mechanical Systems Engineering (MEMS) from ESIEE, France
- Master of Science in Micro Electro Mechanical Systems Engineering (MEMS) from NTU, Singapore

Nanyang Technological University (NTU) in Singapore is one of the top technological universities in Asia with a good reputation in education and research. The College of Engineering at NTU has strong research and teaching experiences in the field of MEMS Engineering. The College currently has several cleanrooms used for teaching and research in MEMS, Microsystems, BioMEMS, and Precision Engineering and Nanotechnology.

The group ESIEE is one of the top Grande Ecoles in France, specialized in Microelectronics and Microsystems with its establishment in Paris to provide a high level international competence for France in microelectronics and microsystems research and industry applications.

Course Structure

The students will enrol in the Programme for three semesters over 12 months.

1st semester

Theoretical and practical academic period in ESIEE, from January to April (4 months);

2nd semester

Theoretical and practical academic period in NTU, from May to August (4 months);

3rd semester

Project attachment in industry or in R&D laboratory and complete a master degree dissertation administered and examined either by NTU or ESIEE staff, from September to December (4 months).

Upon satisfactory completion of the prescribed Programme, the student will be awarded the following 2 master degrees :
- Master of Science in Micro Electro Mechanical Systems Engineering (MEMS) from ESIEE, France
- Master of Science in Micro Electro Mechanical Systems Engineering (MEMS) from NTU, Singapore

Small intake - personalized teaching

The course has a small intake authorizing all over the year excellent interaction between professors and students and tailored learning programmes. The evaluation is based not only on formal exams but also on projects, tremendously improving the benefit brought by the lecture by enabling their direct application.

Coursework

Students are required to take the following 14 mandatory subjects within the first two semesters :

• Fundamentals of Semiconductor Processing and Microsystem Technologies (in ESIEE)
• Micromechanics and Dynamics (in NTU)
• Microfluidics and Heat Transfer for Microsystems (in NTU)
• Design and Simulation Methods and Tools for Microsystems 1 & 2 (in NTU and ESIEE)
• IC and Microsystems Packaging, Testing, Characterization Methods and Tools (in NTU)
• BioMEMS and Applications (in NTU)
• Sensing & Actuation Principles and Applications (in ESIEE)
• Integrated Circuits (IC) and Electronics for MEMS (in ESIEE)
• Wireless Communication Systems and RF-MEMS (in ESIEE)
• Optical MEMS (in ESIEE)
• Nanotechnology 1 & 2 (in ESIEE and NTU)
• Technology and Project Management (in NTU or ESIEE)

Note: Curriculum is subject to changes, contact the program director for details.

Attachment

Different companies and research institute working in micro- and nano-technology in Singapore and in France have proposed attachment projects in the past: Delphi Automotive Systems, SensFab, SenzPak, Singular ID, Defense Medical and Environmental Research Institute (DMERI@DSO), Institute of Microelectronics (IME), Singapore Institute of Manufacturing Engineering (SimTech), Institute of Bio and Nanotechnology (IBN), Institute of Materials Research and Engineering (IMRE), Institute of Chemical Engineering Sciences (ICES) and NTU in Singapore and Philips Semiconductor, Alcatel Vacuum Technology (Adixen) and ESIEE in France.

Fees

A candidate is required to pay tuition fees of Euro10,000 or its equivalent in Singapore dollars when they enrol in the Programme.